Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9567359 | Applied Surface Science | 2005 | 4 Pages |
Abstract
Zn1âxCdxO films were successfully grown by remote plasma enhanced metalorganic chemical vapor deposition (RPE-MOCVD) with diethyl zinc, dimethyl cadmium, and oxygen plasma. The Cd composition x in the Zn1âxCdxO films was tuned by changing a flow rate of group-II sources. With increasing the Cd composition x, the crystal structure was changed from wurzite (WZ) to rock-salt (RS). The optical band-gap of the Zn1âxCdxO films with the wurzite structure up to x â¤Â 0.7 varied from 3.3 eV down to 1.9 eV.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Junji Ishihara, Atsushi Nakamura, Satoshi Shigemori, Toru Aoki, Jiro Temmyo,