Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9567370 | Applied Surface Science | 2005 | 4 Pages |
Abstract
Optical characterization of sol-gel deposited lanthanum nickel oxide, LaNiO3 (LNO) film on Pt-coated Si substrate was performed by spectroscopic ellipsometry and reflectometry. The sum of five Lorentz oscillators was used for LNO dispersion parameterization in spectral range from 190 to 1000Â nm. Two theoretical approaches: Raileigh-Rice theory (RRT) and effective medium approximation (EMA) were considered to account for the effect of LNO upper boundary roughness. Root mean square (rms) values of the heights of irregularities obtained by atomic force microscopy (AFM) and RRT were 2.09 and 5.62Â nm, respectively. Effective layer thickness in EMA approach was found to be 4.62Â nm. Higher values of roughness determined from optical methods with respect to the AFM may be assigned to the effect of convolution of AFM tip and boundary irregularities.
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Authors
Jan Mistrik, Tomuo Yamaguchi, Daniel Franta, Ivan Ohlidal, Gu Jin Hu, Ning Dai,