Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9567488 | Applied Surface Science | 2005 | 4 Pages |
Abstract
We report on an optical interference method to fabricate array microstructures on the surface of silicon wafers by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed microstructures with micrometer-order were fabricated. The diffraction characteristics of the fabricated structures were evaluated. The present technique allows one-step realization of functional optoelectronic devices on silicon surface.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Quan-Zhong Zhao, Jian-Rong Qiu, Chong-Jun Zhao, Xiong-Wei Jiang, Cong-Shan Zhu,