Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9572129 | Applied Surface Science | 2005 | 6 Pages |
Abstract
This contribution deals with the morphological and elemental characterisation with high-energy (MeV) focused ion beams (in particular protons) with special emphasis on high spatial resolution in the sub-micrometer regime and very low minimum detection limits (sub-ppm) in trace element analysis. The most important methods like particle induced X-ray emission (PIXE), Rutherford backscattering spectrometry (RBS), as well as scanning transmission ion microscopy (STIM) and STIM-tomography will be illustrated by examples from material and life sciences.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
T. Butz, Ch. Meinecke, M. Morawski, T. Reinert, M. Schwertner, D. Spemann, J. Vogt,