Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9572137 | Applied Surface Science | 2005 | 4 Pages |
Abstract
A laboratory extreme ultraviolet reflectometer (EUVR) for the wavelength range from 10 to 16Â nm was built at IWS Dresden using a gold target laser pulse plasma (Au-LPP) source. The peak reflectance and the center wavelength are reproduced in relative standard deviation of 0.2 and 0.02%, respectively. In contrast to measurements using linearly polarized s-adjusted synchrotron radiation at PTB, measurements with non-polarized radiation at the EUVR yield systematically lower values for the reflectance due to the smaller reflectance of the p-component at higher angles of incidence.
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Authors
Ludwig van Loyen, Thomas Böttger, Stefan Schädlich, Stefan Braun, Thomas Foltyn, Andreas Leson, Frank Scholze, Stephan Müllender,