Performance and application of a high energy monochromated Cu Kα1 X-ray source for the electron spectroscopy of materials

A Cu Kα1 sealed tube X-ray source (hν = 8047.8 eV) and LiF(2 2 0) Johansson geometry monochromator crystal have been interfaced to a Scienta ESCA300 spectrometer for high energy XPS studies of materials, in particular for the measurement of Auger parameters associated with deep core levels in metallic alloys. The detailed arrangement of the source, monochromator and spectrometer combination is described, and factors affecting the overall intensity and resolution are discussed. The optimisation and characterisation of the system are also described. Several examples of Cu Kα1 excited survey spectra (Cr, Fe, stainless steel), deep core level spectra (Cr 1s, Fe 1s) and Auger spectra (Cr KLL, Cr LMM, Fe KLL) are presented, which illustrate the capability of the system. Auger vacancy satellites are identified in the Cr LMM spectrum. For a series of Cr-Si alloys measurements are reported of the change in the Cr Auger parameter on going from metal to alloy.