Second-harmonic generation in MgxZn1−xO/MgyZn1−yO multilayers fabricated by metalorganic chemical vapor deposition

MgxZn1−xO/MgyZn1−yO multilayers were fabricated by metalorganic chemical vapor deposition (MOCVD) technique and second-harmonic generation (SHG) was carried out by the Maker fringe technique. By comparing the second-harmonic signal generated in ZnO film and Mg0.05Zn0.95O/Mg0.4Zn0.6O multilayers with the same deposition temperature and total thickness, we concluded that a significant enhancement of second-harmonic signal can be achieved in multilayer structure. The second-order susceptibility tensor χzzz(2)=21.2pm/V was deduced from Mg0.05Zn0.95O/Mg0.4Zn0.6O multilayers deposited at 425 °C with a total thickness ∼1 μm, which was about 2 times that of ZnO film.