| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9594907 | Surface Science | 2005 | 9 Pages |
Abstract
Surface roughening due to anisotropic etching was studied experimentally and modeled using the Monte Carlo method for a Kossel crystal. Simulations were used to explore a possible formation mechanism for the appearance of etch hillocks in two and three dimensions. Similarities with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(1Â 0Â 0) are discussed.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
M.P. Suárez, D.A. Mirabella, C.M. Aldao,