Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9595207 | Surface Science | 2005 | 8 Pages |
Abstract
The structural ordering of ultra-thin (<5 nm) Al-oxide films, as grown by dry, thermal oxidation for various oxidation times within the temperature range of 373-773 K, has been investigated by chemical state analysis using X-ray photoelectron spectroscopy (XPS). To this end, the changes in chemical environment of the Al and O ions in the oxide film during the transformation from amorphous Al-oxide to γ-Al2O3 with increasing oxidation temperature and oxide-film thickness has been deduced from the corresponding shifts of the Al and O Auger parameters. It is concluded that the transition from amorphous Al-oxide to γ-Al2O3 is realised by a gradual development of long-range order in the dense-random-packing-of-spheres network of oxygen ions, accompanied by a densification of the oxide film. During the transformation, neither a significant short-range ordering of Al cations nor a redistribution of Al cations over tetrahedral and octahedral interstices of the oxygen sublattice is observed.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
P.C. Snijders, L.P.H. Jeurgens, W.G. Sloof,