X-ray multiple diffraction on the shallow junction of B in Si(0Â 0Â 1)

The hybrid extra Bragg surface diffraction (BSD) peak representing the contribution from the interstitial rich region in the matrix Renninger scan (RS), was used as a fine interface probe to investigate this region as a function of the implantation energy and the thermal annealing condition. The possibility of applying this structural characterization technique to other systems (such as single crystal model catalysts) is intriguing.