Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9618650 | Solar Energy Materials and Solar Cells | 2005 | 14 Pages |
Abstract
The structural, electrical and chemical properties of the LEPECVD grown films have been studied as a function of the deposition parameters (substrate temperature, growth rate, silane dilution). The results show that the films consist of elongated nanocrystals along the ã1 1 1ãdirection, embedded in an amorphous matrix. The crystallite size along the ã1 1 1ã direction is in the range of 9-20 nm. The volume fraction of crystallinity (Ïc) varies between 51% and 78%, depending on preparation conditions. Conductivity values of the order of 10â6 Ωâ1 cmâ1 for the layers were measured, making the material suitable for the p-i-n junction application.
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Authors
M. Acciarri, S. Binetti, M. Bollani, A. Comotti, L. Fumagalli, S. Pizzini, H. von Känel,