Article ID Journal Published Year Pages File Type
9618683 Solar Energy Materials and Solar Cells 2005 12 Pages PDF
Abstract
The effects of the silane concentration f on the structural, optical and electrical properties of undoped hydrogenated silicon films prepared in a plasma-enhanced chemical vapour deposition system have been studied. The electrical conductivity and Hall mobility appear to be controlled by microstructures induced by silane concentration and a clear electrical transport transition from crystalline to amorphous phase has been found when 3%
Related Topics
Physical Sciences and Engineering Chemical Engineering Catalysis
Authors
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