| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9679216 | Tribology International | 2005 | 8 Pages |
Abstract
Carbon nitride (C-N) and boron and carbon nitride (B-C-N) films, 1 and 3Â nm thick, were deposited on magnetic disks by means of a complex treatment method involving plasma irradiation and CN or BCN reactive sputtering in nitrogen and helium mixed gas using two targets of h-BN and graphite. The properties of these extremely thin coatings were evaluated by indentation using an atomic force microscope and nanowear tests using a lateral modulation friction force microscope. The extremely thin B-C-N coatings show highest indentation hardness and good wear resistance properties. It is proposed that this is due to their graduated composition and interfacial properties.
Related Topics
Physical Sciences and Engineering
Chemical Engineering
Colloid and Surface Chemistry
Authors
M. Wang, S. Miyake, T. Saito,