| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9699679 | Sensors and Actuators A: Physical | 2005 | 7 Pages |
Abstract
We have developed an integrated and compact microdevice consisting of piezoresistive microcantilevers with a dedicated electronic read-out. This microdevice designed for force sensor applications can also be used in atomic force microscopy for parallel operation without an optical detection scheme. The system features a 1.25 V/μm resolution with 10 mV noise.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Daisuke Saya, Pascal Belaubre, Fabrice Mathieu, Denis Lagrange, Jean-Bernard Pourciel, Christian Bergaud,