| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9699683 | Sensors and Actuators A: Physical | 2005 | 4 Pages |
Abstract
This paper describes design and fabrication of a capacitive three-axis accelerometer. The devices are bulk micromachined from SOI-wafers by DRIE, and are protected by glass encapsulation. The design is optimised to give direction independent resolution and frequency response, i.e. identical properties in all directions.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Henrik RödjegÃ¥rd, Christer Johansson, Peter Enoksson, Gert Andersson,