| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9699693 | Sensors and Actuators A: Physical | 2005 | 5 Pages |
Abstract
We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
A. Johansson, M. Calleja, P.A. Rasmussen, A. Boisen,