End-fire coupling of a SU-8 waveguide to a silicon mesa photodiode: Integrability in an optical analysis microsystem

This work deals with mesa silicon photodiodes and SU-8 ridge waveguides fabrication and their coupling by means of an end-fire configuration. Both photodiodes and waveguides are electrically and optically characterized and are expected to be used as optical power measurement devices for integration in a miniaturized optical analysis system. The integrability of the devices is studied through an analysis of the further steps necessary to build a complete optical analysis microsystem and the feasibility of such device is empirically anticipated.