Miniaturized Fourier Transform Spectrometer for the near infrared wavelength regime incorporating an electromagnetic linear actuator

We introduce a miniaturized Fourier Transform Spectrometer (FTS) for the near infrared wavelength regime. Our FTS is essentially a Michelson Interferometer that consists of a micro-optical bench for the alignment of diverse optical components, and an integrated electromagnetic linear actuator providing a large travelling range. The system is manufactured in a soft magnetic FeNi alloy using the LIGA technology. The optical components, such as optical fibres, collimation optics and detectors, are assembled in a fully passive manner thanks to highly accurate alignment structures that are patterned as an integral part of the optical bench. The resolution of the spectrometer is currently around 25 nm for a 1540 nm wavelength laser signal. Also, white light spectra have been recorded. The magnetic actuator shows pull-in behaviour that is analysed. Some perspectives for performance improvement are discussed.