Symmetric toggle switch-a new type of rf MEMS switch for telecommunication applications: Design and fabrication

In this paper, we present a new type of rf MEMS switch with low actuation voltage and high isolation, for high rf power and reliability applications in telecommunication. 'Symmetric toggle switch' (STS) is based on push-pull mechanism and utilizes torsion springs and levers, placed symmetrically and transverse to CPW line. The switches designed for 8-14 GHz applications have analytically calculated and FEM simulated actuation voltages in the range of 8-10 V. The simulated insertion loss and isolation for the devices are 0.25 and 35 dB, respectively, at 10 GHz. The fabrication process and preliminary experimental results are also presented.