Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9699754 | Sensors and Actuators A: Physical | 2005 | 8 Pages |
Abstract
In order to improve the power density of microactuators, recent research focuses on the applicability of fluidic power at microscale. The main encountered difficulties in the development of small fluidic actuators are related to production tolerances and assembly requirements. Furthermore, these actuators tend to comprise highly three-dimensional parts, which are incompatible with traditional microproduction technologies. This paper presents accurate production and novel assembly techniques for the development of a hydraulic microactuator. In addition, a scalable low friction seal, relying on surface tension forces, is presented. A prototype piston-type microactuator with a bore of 1Â mm and a length of 13Â mm is developed. Using a gallium-based surface tension seal, pressures of more than 90Â kPa have been sealed without leakage.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Michaël De Volder, Jan Peirs, Dominiek Reynaerts, Johan Coosemans, Robert Puers, Olivier Smal, Benoit Raucent,