Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9699758 | Sensors and Actuators A: Physical | 2005 | 6 Pages |
Abstract
A tuneable Fabry-Perot interferometer fabricated with a tailored surface micromachining process is presented in this work. The device based on a movable flat micromirror driven by electrostatic actuation, is intended for gas sensing applications and operates in the medium-infrared spectral range. The electrostatic actuation features of the proposed structure are presented showing that a flat and parallel displacement of the mobile mirror is obtained. The characterization of the optical transmittance of the structure shows that this displacement allows covering a range of the transmitted spectra between 3.5 and 5.0 μm.
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Authors
N. Sabaté, R. Rubio, C. Calaza, J. Santander, L. Fonseca, I. Grà cia, C. Cané, M. Moreno, S. Marco,