Monolithic-integrated 8CH MEMS variable optical attenuators

Monolithic-integrated variable optical attenuator (VOA) array devices with eight channels are realized and characterized in this study. This VOA array device is derived by DRIE micromachining process and is controlled by using electrostatic comb drive actuator. Both bright and dark types of VOA operations are presented with respect to in-line and reflection types of light attenuation configuration. This multi-channeled VOA device is potentially to be scaled up to 16 channels. Except to the state-of-the-art performance, the reported packaged devices have compact footprint of 18 mm × 18 mm × 5 mm.