Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9777952 | Journal of the European Ceramic Society | 2005 | 6 Pages |
Abstract
X-ray exposures of polysilazane polymer filled with Si3N4 ceramic powders were carried out, showing that it is possible to microstructure those composites. By inserting ceramic fillers, a reduction of the shrinkage during pyrolysis was possible. Further investigations were made to determine the maximum filler content, the required exposure dose and the cross-linking mechanism using IR- and NMR-spectroscopy. As established in the LIGA technique with PMMA, resist layers up to 1Â mm should be possible by deep X-ray lithography on preceramic polymers. Admittedly for the pyrolytic conversion into the amorphous SiCN ceramic, film thickness should be limited as crack formation is deteriorating with increasing dimensions.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Michael Schulz, Martin Börner, Jürgen HauÃelt, Richard Heldele,