Polymer derived ceramic microparts from X-ray lithography-cross-linking behavior and process optimization

X-ray exposures of polysilazane polymer filled with Si3N4 ceramic powders were carried out, showing that it is possible to microstructure those composites. By inserting ceramic fillers, a reduction of the shrinkage during pyrolysis was possible. Further investigations were made to determine the maximum filler content, the required exposure dose and the cross-linking mechanism using IR- and NMR-spectroscopy. As established in the LIGA technique with PMMA, resist layers up to 1 mm should be possible by deep X-ray lithography on preceramic polymers. Admittedly for the pyrolytic conversion into the amorphous SiCN ceramic, film thickness should be limited as crack formation is deteriorating with increasing dimensions.