Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9783888 | Materials Science and Engineering: B | 2005 | 5 Pages |
Abstract
Conventional bulk CMOS scaling starts to fail. In order to prolong the life of Moore's laws, at least one technological booster (innovation) per node has to be introduced starting from the node 32Â nm on. This presents a big technological challenge for the semiconductor industry. On the other hand, accumulation of the boosters permits to retrieve healthy scaling down to sub-10Â nm gate lengths. This strategy even if technologically very challenging, is prospected to prolong the CMOS competitiveness till at least 2020.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Thomas Skotnicki, Frederic Boeuf, Robin Cerutti, Stephane Monfray, Claire Fenouillet-Beranger, Markus Muller, Arnaud Pouydebasque,