| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9783946 | Materials Science and Engineering: B | 2005 | 5 Pages |
Abstract
Finally, we show how to optimise the technique parameters to overcome some of the inherent difficulties that are associated with DHM profiling such as layer removal uniformity, profile distortion due to surface states, and limited depth resolution.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
N.S. Bennett, A.J. Smith, B. Colombeau, R. Gwilliam, N.E.B. Cowern, B.J. Sealy,