Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9784085 | Materials Science and Engineering: B | 2005 | 4 Pages |
Abstract
Indium tin oxide (ITO) films were deposited by radio frequency (rf)-plasma enhanced reactive thermal evaporation (rf-PERTE) at room temperature on intrinsic ZnO/polymer substrates to enhance their electrical and structural properties. The polymer substrate used is polyethylene terephthalate (PET). The thickness of the ZnO films varied in the range 50-150 nm. The average thickness of the ITO films is of about 170 nm. Results show that ITO deposited on bare PET substrates exhibit: an average visible transmittance of about 85% and an electrical resistivity of 5.6 Ã 10â2 Ω cm. ITO on ZnO/PET substrates show the optical quality practically preserved and the resistivity decreased to a minimum value of 1.9Ã10â3 Ω cm for ZnO layers 125 nm thick. The electrical properties of ITO on ZnO/PET are largely improved by the increase in carrier mobility.
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Authors
C. Nunes de Carvalho, G. Lavareda, E. Fortunato, H. Alves, A. Gonçalves, J. Varela, R. Nascimento, A. Amaral,