Article ID Journal Published Year Pages File Type
9784088 Materials Science and Engineering: B 2005 5 Pages PDF
Abstract
This paper reports on the spin deposition of LSCO thin films on a SiO2/Si substrate by a new aqueous solution-gel route. Stable and monometallic precursor solutions are prepared from common and inexpensive oxides or hydroxides. The aqueous La3+ precursor is synthesized by reaction of La2O3 with citric acid. In order to prepare an aqueous Sr2+ precursor Sr(OH)2 is complexed by EDTA. The new peroxo citrato Co2+ precursor is synthesized by reaction of Co(OH)2 with hydrogen peroxide in an aqueous solution of citric acid. Mixing the individual precursors in stoichiometric quantities results in a clear and stable aqueous LSCO precursor solution. Evaporation of water transforms this solution in an amorphous gel that is homogeneous down to nanometer scale. In situ high temperature X-ray diffraction analysis of the gel reveals that phase pure LSCO powder is formed at 550 °C without detection of any intermediate crystalline phase. Spin deposition and crystallization at 625 °C in pure O2 of this aqueous precursor solution resulted in a phase pure conductive LSCO thin film. The sheet resistance of this thin film amounted to 235 Ω/sq. Since the thickness of the film is 120 nm, the specific resistivity was calculated to be 2.8 mΩ cm at room temperature.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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