Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9784093 | Materials Science and Engineering: B | 2005 | 7 Pages |
Abstract
Polycrystalline SrTiO3 films were grown using either a mixture of precursors or a heterometallic precursor. The heterometallic precursor provides some advantages such as a lowering of the crystallisation temperature of the perovskite-type phase and a reduction of carbonate impurities at low temperatures. It also allows to keep the films composition constant over a wide temperature range (550-750 °C). The films are highly textured with [001]SrTiO3 parallel to [0 0 1]Si. The permittivity depends strongly on the films thickness (Ér â¼Â 30 for 10 nm and Ér â¼Â 100 for 100 nm). An equivalent oxide thickness of 1.36 nm (for physical thickness of 15.0 nm) was obtained for optimised SrTiO3 film, with a leakage current density of 10â2 A cmâ2 at 1 V.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
C. Dubourdieu, H. Roussel, C. Jimenez, M. Audier, J.P. Sénateur, S. Lhostis, L. Auvray, F. Ducroquet, B.J. O'Sullivan, P.K. Hurley, S. Rushworth, L. Hubert-Pfalzgraf,