| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9784127 | Materials Science and Engineering: B | 2005 | 6 Pages |
Abstract
Homogeneous films have been deposited on Pt/TiN/SiO2/Si substrates in the 300-500 °C temperature range. XRD and XPS analyses have shown that fluorine or carbonate containing films are obtained adopting Sr(hfac)2tetraglyme or Sr(dpm)2pmdeta, respectively.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
C. Bedoya, G.G. Condorelli, A. Di Mauro, G. Anastasi, I.L. Fragalà , J.G. Lisoni, D. Wouters,