Effects of CO2 laser conditioning of the antireflection Y2O3/SiO2 coatings at 351Â nm

We found that laser-induced damage threshold (LIDT) of the films conditioning at 30 mm/s scanning speed was increased by more than a factor of 3 over the thresholds of the as-deposited films. The conditioning effect was correlated with an irradiation-induced decrease of the defect density and absorption of the films.