Article ID Journal Published Year Pages File Type
9785789 Optics Communications 2005 7 Pages PDF
Abstract
The lensless digital in-line microscope is proposed as a simple tool for post-production inspection of metallic film patterns on silicon wafers. Transmission holographic imaging is achieved by using a superluminescent diode emitting in the near infrared coupled into a single-mode high numerical aperture optical fiber and an infrared vidicon camera. Images of 300 nm thick vapor-deposited aluminum bolometers are presented.
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Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Preview
Infrared lensless holographic microscope with a vidicon camera for inspection of metallic evaporations on silicon wafers
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