| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9786107 | Optics Communications | 2005 | 6 Pages |
Abstract
A method of measuring step-surface altitude difference using a two-grating interferometer is described. The advantage of this method is that the measuring range of the interferometer is large and can be changed freely by turning the grating. The interference fringes are produced by the (+1,0)th- and (0,+1)th-order beams diffracted from two identical binary step gratings with the same line spacing. Sinusoidal phase modulation is easily applied to detect the phase distribution of interference pattern by sinusoidal vibration of the grating. A plane reflector of â¼3 mm thickness is measured with this two-grating interferometer.
Keywords
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Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Yande Xu,