Article ID Journal Published Year Pages File Type
9793063 Computational Materials Science 2005 6 Pages PDF
Abstract
DFT based methods using plane wave expansions and pseudopotentials are used to unravel the adsorption mechanism of TTIP on Si(1 0 0) surface during the early stage of its deposition at low temperatures. Ab initio Car-Parrinello (CP) dynamics have been performed at 600 K for about 10 ps. Our preliminary results show that the TTIP is bound to the surface through one of its terminal methyl group. This process is accompanied by an H atom transfer from the same methyl group to the surface.
Related Topics
Physical Sciences and Engineering Engineering Computational Mechanics
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