Article ID Journal Published Year Pages File Type
9796577 Materials Science and Engineering: A 2005 8 Pages PDF
Abstract
The results revealed that through controlling of the deposition parameters, the TiN/AlN nano-multilayer films with periods ranging from 2.4 to 67.6 nm were obtained. At periods ≦3.6 nm, the multilayers had extremely high hardness, excellent adhesion and wear performance. The field tests confirmed the nano-multilayers could provide a significant improvement in actual machining performance, as compared with the traditional single-layer TiN film.
Related Topics
Physical Sciences and Engineering Materials Science Materials Science (General)
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