Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9796577 | Materials Science and Engineering: A | 2005 | 8 Pages |
Abstract
The results revealed that through controlling of the deposition parameters, the TiN/AlN nano-multilayer films with periods ranging from 2.4 to 67.6 nm were obtained. At periods â¦3.6 nm, the multilayers had extremely high hardness, excellent adhesion and wear performance. The field tests confirmed the nano-multilayers could provide a significant improvement in actual machining performance, as compared with the traditional single-layer TiN film.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
S.H. Yao, Y.L. Su, W.H. Kao, T.H. Liu,