Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9809414 | Surface and Coatings Technology | 2005 | 6 Pages |
Abstract
This paper describes some of our modeling efforts for gas discharges, used for plasma surface engineering applications. Depending on the application, we use either a fluid approach or particle-in-cell-Monte Carlo (PIC-MC) models to simulate the plasma behavior. The examples shown in this paper include fluid modeling for nanoparticle formation in silane discharges and for nitrogen dielectric barrier discharges, as well as PIC-MC simulations for a magnetron discharge.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Annemie Bogaerts, Kathleen De Bleecker, Ivan Kolev, Myriam Madani,