| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9809463 | Surface and Coatings Technology | 2005 | 4 Pages |
Abstract
The plasma oxidation of stainless steel was studied using plasmas of water vapor and oxygen. The films generated on the stainless steel were analyzed by a range of surface analysis methods such as SIMS, XRD, Raman, and AES, and the structure and composition of oxide films were determined. The oxide films generated in water vapor plasma and oxygen plasma were found to have different structures, attributable to the high oxidative property of water vapor plasma in comparison to oxygen plasma.
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Physical Sciences and Engineering
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Authors
Tatsuya Suzuki, Yukiko Sawado, Yasuhiko Fujii,