Optimum conditions for ozone formation in a micro dielectric barrier discharge

Micro-dielectric barrier discharge has attracted attention as a practical solution to realize an atmospheric pressure glow discharge process suitable for the surface treatments including ozone generation. In order to investigate the optimum conditions for the effective ozone formation in a micro-dielectric barrier discharge, measurements of ozone concentration were carried out for various conditions such as the gap length, the dielectric material and the operating gas. It was found that the optimum discharge conditions extremely differed in the kinds of the operating gases and the dielectric materials. In dry air, the dielectric material with the low dielectric constant and thermal conductivity, which might contribute the restriction of the gas temperature rise in the discharge region, was effective to obtain the high ozone yield and concentration. The optimum gap length was considered to be in the range of 0.6-0.8 mm. In oxygen, using a quartz glass disk as the dielectric material, the required condition to obtain the high ozone yield and concentration was expanded.