Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9809630 | Surface and Coatings Technology | 2005 | 7 Pages |
Abstract
Silicon dioxide films were ion beam-sputtered on to the surface of ion-implanted and unimplanted silicon nitride with different microstructures. The tribological properties of these materials were evaluated using a block-on-ring wear tester under nonlubricated conditions against commercially available silicon nitride materials, and were related to the effect of surface modification by these ion beam techniques. The ion beam-sputtered silicon dioxide film resulted in a dramatic reduction of specific wear rate in each sample, accompanied by low friction coefficient. From surface roughness analysis and cross-sectional transmission electron microscopy observations, it was clarified that the silica film itself was easily worn but a thin silica film with a thickness of 10-20 nm was retained and prevented the material beneath the film from wearing. A specific wear rate of 1.59Ã10â10 mm2/N and low friction coefficient of 0.2 were easily obtained even in conventional silicon nitride by the silica coating.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Naoki Nakamura, Yukihiko Yamauchi,