| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9809675 | Surface and Coatings Technology | 2005 | 4 Pages |
Abstract
From the XPS measurement, the doped carbon resulted in Gaussian-like carbon depth profiles with a maximum concentration of 40 at.%, and in the formation of titanium carbide and graphite in the surface of TiN film. Carbon-doped TiN films exhibit higher hardness value of 2300-2550 kgf/mm2 and a low friction coefficient of 0.15 in comparison with TiN film. From these measurements of XPS, XRD and mechanical properties, it was clear that mechanical properties for carbon-doped TiN were affected by concentration and chemical state of carbon in the surface layer of TiN.
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Authors
Isao Nakamura, Michiko Sasaki, Ichiro Takano, Yoshio Sawada,