Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9809701 | Surface and Coatings Technology | 2005 | 5 Pages |
Abstract
Electrical resistivity of the TixC1âx films decreased from an insulator as diamond-like carbon to 1.7Ã10â5 Ωm as titanium with increase of the value x in TixC1âx. Also the resistivity of ZryC1âx films showed the same behavior as the TixC1âx films. While the friction coefficient of the films increased with an increasing dose of titanium or zirconium, a low friction coefficient was obtained both of in the region of x or y=0.4-0.5. The optimum composition x or y to obtain both of the low electrical resistivity and low friction coefficient was investigated as follows. In the case of TixC1âx films, the optimum x was 0.2 in a high vacuum and 0.5 in an air atmosphere, while the composition y in ZryC1âx films was 0.6 in an air atmosphere and 0.4 in a vacuum, respectively.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Michiko Sasaki, Yoji Kozukue, Koji Hashimoto, Kazunori Takayama, Isao Nakamura, Ichiro Takano, Yoshio Sawada,