Article ID Journal Published Year Pages File Type
9809810 Surface and Coatings Technology 2005 4 Pages PDF
Abstract
Metal Vapor Vacuum Arc (MEVVA) ion source and ion implanter developed in Beijing Normal University (BNU) is introduced. The application in surface modification of materials with MEVVA ion implanter is reviewed.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
MEVVA ion source development and its industrial applications at Beijing Normal University
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