Article ID Journal Published Year Pages File Type
9809826 Surface and Coatings Technology 2005 5 Pages PDF
Abstract
It was found that nitrogen content of films were in the range of 13.5-21.4 at.%, decreased with increasing bias voltage. As the bias voltage was increased, the deposition rate decreased due to resputtering and the substrate temperature increased as a result of the energetic ions. The film hardness increased with increasing bias voltage up to 30 GPa at −60 V. The results from Raman and XPS analyses showed that the amount of sp3 CC or sp3 CN bonds increased with increasing bias voltage, while the number of the CH, NH and sp2 CN bonds decreased.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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