Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812056 | Thin Solid Films | 2005 | 4 Pages |
Abstract
Barium strontium titanate (Ba0.5Sr0.5TiO3, BST) thin films were prepared on Pt/Ti/SiO2/Si and Pt/Cr/SiO2/Si substrates by sol-gel method. The effects of Pt/Ti and Pt/Cr bottom electrodes on the microstructure and dielectric properties of BST thin films were studied. The X-ray diffraction patterns show that both these films crystallize into a perovskite structure. The atomic force micrographs indicate that the films using Pt/Ti and Pt/Cr as bottom electrodes have different grain distributions and grain sizes. The dielectric constant of the films using Pt/Cr as bottom electrodes decreases significantly and the loss tangent and tunability decrease slightly. However, the figure of merit of the films using Pt/Cr as bottom electrodes still increases from 24.3 to 27.6.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Huichun Yu, Min Li, Chun Hui, Ailan Xu, Wenwen Shao,