Characterization of crystalline Pb0.92La0.08Zr0.4Ti0.6O3 thin films grown by off-axis radio frequency magnetron sputtering

In this study, we examine the growth conditions for Pb0.92La0.08Zr0.4Ti0.6O3 thin films with a linear electro-optical response. Films grown on SrTiO3(100) substrate show good crystalline quality and surface smoothness, if deposited within a narrow range of substrate temperatures around 530 °C. Such films had a (002) rocking curve full width at half maximum less than 0.2°, and a surface roughness less than 0.4 nm. X-ray photoelectron spectroscopy analysis confirmed the absence of surface impurity phases and revealed a single oxidation state for Pb2+, Zr4+, and Ti4+cations. Good crystalline quality and a smooth film surface are required for the use of these materials in optical device applications.