Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812175 | Thin Solid Films | 2005 | 4 Pages |
Abstract
High quality LaNiO3 (LNO) thin films with preferred orientation could be synthesized on Pt/Ti/SiO2/Si substrates at 700 °C using the chemical solution deposition method. The homogeneous and stable LNO precursor solutions were prepared using lanthanum isopropoxide and nickel (II) acetylacetonate in a mixed solvent of absolute ethanol and 2-methoxyethanol. The oriented LNO thin films exhibit metallic electro-conduction, and their resistivity at room temperature is sufficiently low for making them an alternative electrode material for functional ceramic thin films.
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Authors
Kengo Ueno, Toshiaki Yamaguchi, Wataru Sakamoto, Toshinobu Yogo, Koichi Kikuta, Shin-ichi Hirano,