Article ID Journal Published Year Pages File Type
9812395 Thin Solid Films 2005 4 Pages PDF
Abstract
In this paper we present results of intrinsic/non-doped zinc oxide deposited at room temperature by radio frequency magnetron sputtering able to be used as a semiconductor material on electronic devices, like for example ozone gas sensors, ultra-violet detectors and thin film transistors. These films present a resistivity as high as 2.5×108 Ω cm with an optical transmittance of 90%. Concerning the structural properties, these films are polycrystalline presenting a uniform and very smooth surface.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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