Article ID Journal Published Year Pages File Type
9812404 Thin Solid Films 2005 5 Pages PDF
Abstract
Inter-grain electron-coupling effects are investigated at 4.2 K in dual-gated, point-contact, single-electron transistors fabricated in nanocrystalline silicon. The nanocrystalline silicon film is ∼40 nm thick, with grains ∼10-30 nm in size. The point-contact transistor channel is ∼30 nm×30 nm×40 nm in size, with two side-gates. Only a few grains exist within the channel and different grains contribute in varying degrees to the device conduction. By modifying the inter-grain coupling using selective oxidation of the grain boundaries, both electrostatic and wavefunction-coupling effects can be observed in the Coulomb oscillations vs. the two gate voltages.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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