Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812404 | Thin Solid Films | 2005 | 5 Pages |
Abstract
Inter-grain electron-coupling effects are investigated at 4.2 K in dual-gated, point-contact, single-electron transistors fabricated in nanocrystalline silicon. The nanocrystalline silicon film is â¼40 nm thick, with grains â¼10-30 nm in size. The point-contact transistor channel is â¼30 nmÃ30 nmÃ40 nm in size, with two side-gates. Only a few grains exist within the channel and different grains contribute in varying degrees to the device conduction. By modifying the inter-grain coupling using selective oxidation of the grain boundaries, both electrostatic and wavefunction-coupling effects can be observed in the Coulomb oscillations vs. the two gate voltages.
Keywords
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
M.A.H. Khalafalla, Z.A.K. Durrani, H. Mizuta, H. Ahmed, S. Oda,