Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812516 | Thin Solid Films | 2005 | 8 Pages |
Abstract
By tilting the substrate with respect to the sputter source, an in-plane aligned YSZ layer was obtained.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
S. Mahieu, P. Ghekiere, G. De Winter, D. Depla, R. De Gryse, O.I. Lebedev, G. Van Tendeloo,