| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9812525 | Thin Solid Films | 2005 | 10 Pages |
Abstract
The phase composition can be influenced by several deposition process parameters and its dependence on deposition rate is investigated in detail.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Detlef U. Wiechert, Stefan P. Grabowski, Matthias Simon,