Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812536 | Thin Solid Films | 2005 | 6 Pages |
Abstract
The structure, interfacial nanochemistry, and electrical properties of sol-gel derived Pb(Zr0.3Ti0.7)O3 or PZT (30 / 70) thin films on metal-organic chemical vapor deposited (0001) GaN/sapphire substrates are reported. The X-ray diffraction analysis confirmed a phase-pure and highly oriented (111) PZT and Rutherford backscattering spectroscopy was used to ascertain the Zr/Ti ratio. The secondary ion mass spectrometry depth profile and electron energy loss spectroscopy with high energy and spatial resolution indicated a chemically sharp PZT/GaN interface with insignificant interdiffusion between Pb, Zr, or Ti in PZT and Ga and N in GaN. The lower capacitance density (C / A = 0.35 μF/cm2) and asymmetrical polarization (P â¼Â 4 μC/cm2) hysteresis loops of PZT in Pt/PZT/GaN or metal-ferroelectric-semiconductor configuration were attributed to the high depolarization field (Edepol) within PZT. In contrast, PZT in Pt/PZT/Ru/GaN or metal-ferroelectric-metal configuration exhibited high capacitance density (C / A = 1.25 μF/cm2) and polarization (P â¼Â 30 μC/cm2).
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
W. Cao, S. Bhaskar, J. Li, S.K. Dey,